(18) MATLABによる位相シフト干渉法の研究
高井信勝
北海学園大学工学部研究報告, 第35号, pp.91-106, 2008-2
A computer simulation with MATLAB is presented with respect to the phase-shifting interferometry to reveal the effect of surface roughness of object. To do this, the model of the surface of objects is used, and their roughness is evaluated numerically. It is shown that the phase distribution of surface is measurable by means of the phase-shifting interferometry for the surface roughness less than the standard deviation of approximately π/5. It is also revealed that the optimum filtering is required to perform successfully the phase unwrapping which is unavoidable for the phase-shifting interferometry.
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